Vertical taper fabrication process of a narrow band wavelength division multiplexer

A method of fabricating a phased array narrow band wavelength division multiplexer including an arrayed waveguide, a slab waveguide and a transition region between the array waveguide and the slab waveguide comprising etching the transition region with a reactive ion etch to form vertically tapered...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Lehuede, Philippe, Beguin, Alain
Format:	Patent
Sprache:	eng
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!