Vertical taper fabrication process of a narrow band wavelength division multiplexer
A method of fabricating a phased array narrow band wavelength division multiplexer including an arrayed waveguide, a slab waveguide and a transition region between the array waveguide and the slab waveguide comprising etching the transition region with a reactive ion etch to form vertically tapered...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A method of fabricating a phased array narrow band wavelength division multiplexer including an arrayed waveguide, a slab waveguide and a transition region between the array waveguide and the slab waveguide comprising etching the transition region with a reactive ion etch to form vertically tapered waveguides between the arrayed waveguides. |
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