CENTRIFUGE AND METHOD FOR CENTRIFUGING A SEMICONDUCTOR WAFER

CENTRIFUGE AND METHOD FOR CENTRIFUGING A SEMICONDUCTOR WAFER

A centrifuge for a semiconductor wafer has a centrifuge plate for holding a semiconductor wafer, has a drive for setting the centrifuge plate in rotation, and has a device for supplying a medium to a front side and a rear side of the semiconductor wafer. The centrifuge has a housing which separates...

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Hauptverfasser: HOHL, GEORG-FRIEDRICH, BRUNNER, ROLAND, BAUER-MAYER, SUSANNE, BRUNNER, GUNTHER, LUTHE, HANS-JOACHIM, SOLLINGER, FRANZ
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creator HOHL, GEORG-FRIEDRICH
BRUNNER, ROLAND
BAUER-MAYER, SUSANNE
BRUNNER, GUNTHER
LUTHE, HANS-JOACHIM
SOLLINGER, FRANZ
description A centrifuge for a semiconductor wafer has a centrifuge plate for holding a semiconductor wafer, has a drive for setting the centrifuge plate in rotation, and has a device for supplying a medium to a front side and a rear side of the semiconductor wafer. The centrifuge has a housing which separates a centrifuging area and the semiconductor wafer from the environment, and a device for generating a laminar gas flow in the housing. A method for centrifuging a semiconductor wafer has the semiconductor wafer being centrifuged in a laminar gas flow.
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title CENTRIFUGE AND METHOD FOR CENTRIFUGING A SEMICONDUCTOR WAFER
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