Photomask and integrated circuit manufactured by automatically eliminating design rule violations during construction of a mask layout block

A photomask and integrated circuit manufactured by eliminating design rule violations during construction of a mask layout block are disclosed. A photomask includes a substrate and a patterned layer formed on at least a portion of the substrate. The patterned layer may be formed using a mask pattern...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Oren, Micha, Rittman, Dan
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A photomask and integrated circuit manufactured by eliminating design rule violations during construction of a mask layout block are disclosed. A photomask includes a substrate and a patterned layer formed on at least a portion of the substrate. The patterned layer may be formed using a mask pattern file created by analyzing a selected position for a polygon in a mask layout block, identifying a design rule violation in the mask layout block if the selected position is less than a design rule from a technology file, and automatically preventing the polygon from being placed in the mask layout block at the selected position if the design rule violation is identified.