Method for producing article coated with patterned film and photosensitive composition

There can be provided a method for producing a pattern film-coated article which has excellent film formability, can remove unexposed portions of a film completely in the development step after exposing the film to light. and has excellent pattern accuracy; and a photosensitive composition. The meth...

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Bibliographische Detailangaben
Hauptverfasser: Tatsumisago, Masahiro, Minami, Tsutomu, Tadanaga, Kiyoharu, Matsuda, Atsunori, Kawadu, Mitsuhiro, Nakamura, Koichiro, Yamamoto, Hiroaki
Format: Patent
Sprache:eng
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Zusammenfassung:There can be provided a method for producing a pattern film-coated article which has excellent film formability, can remove unexposed portions of a film completely in the development step after exposing the film to light. and has excellent pattern accuracy; and a photosensitive composition. The method for producing a pattern film-coated article comprises the steps of coating a photosensitive composition comprising an organometallic or organosilicon compound having photosensitivity and a hydrolyzable metal or silicon alkoxide on a substrate, irradiating the coated film on the substrate with light to polymerize the exposed portions of the coated film and then dissolving unexposed portions to remove them, wherein a pattern film-coated article is produced from an allyl group-containing metal or silicon alkoxide as the organometallic or organosilicon compound.