Holding means
For especially simple and reliable handling of thin and/or bent semiconductor wafers it is proposed in a corresponding holding means ( 100 ) that there is a gas flowing through at least one first means ( 5 ) for producing the forces which pull a semiconductor wafer toward the means ( 100 ) based on...
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| creator | Binder, Alfred Aigner, Kurt Kroupa, Gerhard Matschitsch, Martin Pucher, Gerhard Scherf, Werner Unterweger, Josef Zerlauth, Stefan |
| description | For especially simple and reliable handling of thin and/or bent semiconductor wafers it is proposed in a corresponding holding means (
100
) that there is a gas flowing through at least one first means (
5
) for producing the forces which pull a semiconductor wafer toward the means (
100
) based on the Bernoulli principle and that there is at least one second means (
2, 3
) for holding the semiconductor wafer on the means (
100
) as a result of the forces produced by at least one electromagnetic field. |
| format | Patent |
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100
) that there is a gas flowing through at least one first means (
5
) for producing the forces which pull a semiconductor wafer toward the means (
100
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2, 3
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100
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100
) that there is a gas flowing through at least one first means (
5
) for producing the forces which pull a semiconductor wafer toward the means (
100
) based on the Bernoulli principle and that there is at least one second means (
2, 3
) for holding the semiconductor wafer on the means (
100
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100
) that there is a gas flowing through at least one first means (
5
) for producing the forces which pull a semiconductor wafer toward the means (
100
) based on the Bernoulli principle and that there is at least one second means (
2, 3
) for holding the semiconductor wafer on the means (
100
) as a result of the forces produced by at least one electromagnetic field.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng |
| recordid | cdi_uspatents_applications_20020140148 |
| source | USPTO Published Applications |
| title | Holding means |
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