Holding means
For especially simple and reliable handling of thin and/or bent semiconductor wafers it is proposed in a corresponding holding means ( 100 ) that there is a gas flowing through at least one first means ( 5 ) for producing the forces which pull a semiconductor wafer toward the means ( 100 ) based on...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | For especially simple and reliable handling of thin and/or bent semiconductor wafers it is proposed in a corresponding holding means (
100
) that there is a gas flowing through at least one first means (
5
) for producing the forces which pull a semiconductor wafer toward the means (
100
) based on the Bernoulli principle and that there is at least one second means (
2, 3
) for holding the semiconductor wafer on the means (
100
) as a result of the forces produced by at least one electromagnetic field. |
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