Semiconductor integrated circuit device having an optimal circuit layout to ensure stabilization of internal source voltages without lowering circuit functions and/or operating performance

In a semiconductor integrated circuit device which comprises a first interconnect channel including a plurality of second-layer metal interconnect layers extended in a first direction over a semiconductor chip, a second interconnect channel including a plurality of third-layer metal interconnect lay...

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Bibliographische Detailangaben
Hauptverfasser: Nakai, Kiyoshi, Riho, Yoshiro, Egawa, Hidekazu, Suzuki, Yukihide, Fujii, Isamu
Format: Patent
Sprache:eng
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Zusammenfassung:In a semiconductor integrated circuit device which comprises a first interconnect channel including a plurality of second-layer metal interconnect layers extended in a first direction over a semiconductor chip, a second interconnect channel including a plurality of third-layer metal interconnect layers extended in a second direction perpendicular to the first direction, an internal power supply circuit which receives a source voltage supplied from an external terminal and generates a voltage different from the source voltage, and which is provided with stabilizing capacitors, a large part of the stabilizing capacitors are occupied by capacitors formed in an area in which the second- and third-layer metal interconnect lines intersect each other.