Structure and process for buried bitline and single sided buried conductor formation

Semiconductor devices generally, and in particular DRAM memory devices, having buried, single-sided conductors are provided. Additionally, methods of fabricating semiconductor devices having buried, single-sided conductors are provided.

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Bibliographische Detailangaben
Hauptverfasser: Athavale, Satish, Divakaruni, Ramachandra, Mandelman, Jack
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Semiconductor devices generally, and in particular DRAM memory devices, having buried, single-sided conductors are provided. Additionally, methods of fabricating semiconductor devices having buried, single-sided conductors are provided.