Moving/guiding apparatus and exposure apparatus using the same
A moving/guiding apparatus has X- and Y-direction movable bodies guided and moved in intersecting directions, arranged at vertically different positions, and restrained in a vertical direction, respectively, and an X-Y movable body guided vertically on a surface plate ( 11 ) and movable in moving di...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | A moving/guiding apparatus has X- and Y-direction movable bodies guided and moved in intersecting directions, arranged at vertically different positions, and restrained in a vertical direction, respectively, and an X-Y movable body guided vertically on a surface plate (
11
) and movable in moving directions of the X- and Y-direction movable bodies. A vacuum container is provided for accommodating these movable bodies. Actuators for driving the X-direction movable body (
41
) and Y-direction movable body (
42
) in the intersecting directions are set outside the vacuum container. The movable body (
3
) is driven in two intersecting directions upon reception of forces from guide surfaces in a horizontal direction of the movable bodies (
41, 42
). |
|---|