Table
Structure for disposing a material to be treated at an acute angle relative to the axis of rotation so as to permit the substrate to rotate relative to said structure.
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| Hauptverfasser: | , , , |
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| Format: | Patent |
| Sprache: | eng |
| Online-Zugang: | Volltext bestellen |
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| Zusammenfassung: | Structure for disposing a material to be treated at an acute angle relative to the axis of rotation so as to permit the substrate to rotate relative to said structure. |
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