ELECTROSTATIC CHUCK HAVING COMPOSITE BASE AND METHOD

ELECTROSTATIC CHUCK HAVING COMPOSITE BASE AND METHOD

An electrostatic chuck 55 comprises an electrostatic member 100 including a dielectric 115 having a surface 120 adapted to receive a substrate 30. The dielectric 115 covers an electrode 105 that is chargeable to electrostatically hold the substrate 30. The base 175 comprises a composite of a plurali...

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Hauptverfasser: SHAMOUILIAN, SHAMOUIL, KUMAR, ANANDA H, KHOLODENKO, ARNOLD, WANG, YOU, VEYTSER, ALEXANDER M, BEDI, SURINDER S, NARENDRNATH, KADTHALA R, KATS, SEMYON L, GRIMARD, DENNIS S, CHENG, WING L
Format: Patent
Sprache:eng
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Zusammenfassung:An electrostatic chuck 55 comprises an electrostatic member 100 including a dielectric 115 having a surface 120 adapted to receive a substrate 30. The dielectric 115 covers an electrode 105 that is chargeable to electrostatically hold the substrate 30. The base 175 comprises a composite of a plurality of materials, such as, ceramic and metal, for example silicon carbide and aluminum. Optionally, a support 190 can be provided to support the base 175.