Electronic device including langasite structure compounds and method for making same
An electronic device includes a piezoelectric layer formed of an ordered Langasite structure compound having the formula A 3 BC 3 D 2 E 14 , wherein A is calcium, B is niobium or tantalum, C is gallium, D is silicon, and E is oxygen. At least one electrode is connected to the piezoelectric layer and...
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| Sprache: | eng |
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| Zusammenfassung: | An electronic device includes a piezoelectric layer formed of an ordered Langasite structure compound having the formula A
3
BC
3
D
2
E
14
, wherein A is calcium, B is niobium or tantalum, C is gallium, D is silicon, and E is oxygen. At least one electrode is connected to the piezoelectric layer and may be configured to define a device, such as a SAW resonator or filter, or a BAW resonator or filter. The ordered Langasite structure compound may have a substantially perfectly ordered structure. |
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