High temperature sensor
High temperature substance sensor, including a substrate ( 4 ), a device ( 6 ) for raising and maintaining the temperature of the sensor, and a layer like capacitor structure ( 38 ) with structure sizes smaller than 50 m, upon which a functional layer ( 18 ) is applied. In accordance with the invent...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | High temperature substance sensor, including
a substrate (
4
),
a device (
6
) for raising and maintaining the temperature of the sensor, and
a layer like capacitor structure (
38
) with structure sizes smaller than 50 m, upon which a functional layer (
18
) is applied.
In accordance with the invention the layer-like capacitor structure (
38
) is produced by the following:
application of a complete or already pre-structured electrically conductive layer as precursor of the capacitor structure (
38
) using a thick layer technique,
structuring the electrically conductive layer using a photolithographic structuring process. |
|---|