Method for applying photoresist to a base body surface
An applicator device for applying photoresist to a surface of a base body having a receiving device therefor, including a photoresist feeder movable relative to the base body, the feeder being a point source device, and a device for performing a defined movement of the base body, comprising a conica...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | An applicator device for applying photoresist to a surface of a base body having a receiving device therefor, including a photoresist feeder movable relative to the base body, the feeder being a point source device, and a device for performing a defined movement of the base body, comprising a conically shaped tip formed on the point source device for applying photoresist in a defined spot. |
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