VARIABLE RADIO FREQUENCY MICRO-ELECTROMECHANICAL SWITCH

VARIABLE RADIO FREQUENCY MICRO-ELECTROMECHANICAL SWITCH

A radio frequency micro-electromechanical switch (generally referred to using the acronyms RF MEMS) is described. Also described is a method of producing such an RF MEMS switch.

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Bibliographische Detailangaben
Hauptverfasser: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, UNIVERSITE DE LIMOGES, AIRMEMS
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A radio frequency micro-electromechanical switch (generally referred to using the acronyms RF MEMS) is described. Also described is a method of producing such an RF MEMS switch.