Semiconductor Device and Manufacturing Method Thereof

The present disclosure provides a semiconductor device and a manufacturing method thereof. The semiconductor device comprises a substrate, a groove formed on the substrate, a channel layer structure grown under restriction of the groove structure, the channel layer structure being exposed from an upper surface of the substrate; a barrier layer covering the exposed channel layer structure, a two-dimensional electron gas and a two-dimensional hole gas respectively formed on a second face and a first face of the channel layer structure, and a source, a gate, and a drain formed on the first face/second face of the channel layer structure, and a bottom electrode formed on the second face/first face of the channel layer structure. The semiconductor device can reduce the gate leakage current, has a high threshold voltage, high power, and high reliability, can achieve a low on-resistance and a normally off state of the device, and can provide a stable threshold voltage, such that the semiconductor device has good switching characteristics. Moreover, the local electric field intensity may be effectively reduced, and the overall performance and reliability of the device may be improved; and the structure and manufacturing process of the semiconductor device are relatively simple, which can effectively reduce the manufacturing cost.