Electron emitting element
An electron emitting element includes a vacuum container , electron sources that emit an electron beam, and a power supply structure that supplies a voltage to the electron sources. The electron sources are formed on a silicon substrate . The power supply structure is disposed outside the vacuum con...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | An electron emitting element includes a vacuum container , electron sources that emit an electron beam, and a power supply structure that supplies a voltage to the electron sources. The electron sources are formed on a silicon substrate . The power supply structure is disposed outside the vacuum container |
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