Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications

[EN] Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development of a versatile 300 nm guiding film height silicon nitride platform. The authors acknowledge financial support through projects TEC2013-42332-P, TEC2015-69787-REDT PIC4TB, TEC2016-80385-P SINXPECT, TEC2014-54449-C3-1-R, GVA PROMETEO 2013/012 and EC H2020-ICT-27-2015 PICs4all. G.M. acknowledges BES-2014-068523, L.A.B. acknowledges PTA2015-11309-I, J.F. acknowledges DI-15-08031 and R.B. acknowledges PTQ-15-07966. Muñoz Muñoz, P.; Mico-Cabanes, G.; Bru-Orgiles, LA.; Pastor Abellán, D.; Pérez-López, D.; Doménech Gómez, JD.; Fernández, J... (2017). Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications. Sensors. 17 (9)(2088):1-25. https://doi.org/10.3390/s17092088