Thermochromic properties of vanadium oxide thin films prepared by reactive magnetron sputtering at different oxygen concentrations

Vanadium dioxide (VO2) is a thermochromic (TC) material, exhibits a reversible transmittance change in the near-infrared (NIR) region upon heating above a critical temperature τc, due to an insulator-to-metal phase transition. Numerous studies on the V–O system can be found in the literature, includ...

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Veröffentlicht in:Vacuum 2023-04, Vol.210, p.111887, Article 111887
Hauptverfasser: Khairy, Kholida Tul, Song, Yeongha, Yoon, Jang-Hee, Montero, José, Österlund, Lars, Kim, Seohan, Song, Pungkeun
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Sprache:eng
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Zusammenfassung:Vanadium dioxide (VO2) is a thermochromic (TC) material, exhibits a reversible transmittance change in the near-infrared (NIR) region upon heating above a critical temperature τc, due to an insulator-to-metal phase transition. Numerous studies on the V–O system can be found in the literature, including the synthesis of VO2 films. The phase diagram of the V–O system involves complicated suboxide phases that prevent pure VO2 formation and obscures quantitative analysis. Here, VO2 thin films were systematically prepared with various oxygen flow ratios (Γ) using reactive magnetron sputtering. Thin films prepared with Γ = 4.1% show dominant VO2 phase and the highest TC performance. The Γ-range producing dominant VO2 phase is found to be narrow: 3.7% 
ISSN:0042-207X
1879-2715
1879-2715
DOI:10.1016/j.vacuum.2023.111887