On the influence of uncertainties in scattering potentials on quantitative analysis using keV ions

On the influence of uncertainties in scattering potentials on quantitative analysis using keV ions

Experimental spectra from Medium-Energy Ion Scattering were compared to Monte-Carlo simulations (employing the TRBS code) to obtain information on the scattering potential. The impact of uncertainties in the interatomic potential on quantification of sample properties such as thickness, composition...

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Veröffentlicht in:Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2020-05, Vol.470, p.21-27
Hauptverfasser: Bruckner, Barbara, Strapko, Tomáš, Sortica, Mauricio A., Bauer, Peter, Primetzhofer, Daniel
Format: Artikel
Sprache:eng
Schlagworte:
Interaction potential
Low-Energy Ion Scattering
Medium-Energy Ion Scattering
Monte-Carlo simulations
Screening corrections
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Zusammenfassung:Experimental spectra from Medium-Energy Ion Scattering were compared to Monte-Carlo simulations (employing the TRBS code) to obtain information on the scattering potential. The impact of uncertainties in the interatomic potential on quantification of sample properties such as thickness, composition or electronic stopping was investigated for different scattering geometries: backscattering and transmission. For backscattered He ions with tens of keV primary energy the scattering potential was found to overestimate the multiple scattering background in the energy spectra resulting in an uncertainty of
ISSN:0168-583X
1872-9584
1872-9584
DOI:10.1016/j.nimb.2020.02.018