Electrochromism of DC magnetron sputtered TiO2 thin films: Role of deposition parameters

Electrochromism of DC magnetron sputtered TiO2 thin films: Role of deposition parameters

We performed a comprehensive study on the electrochromism in TiO2 thin films made by reactive DC magnetron sputtering and elucidated the roles of sputter gas pressure p, O2/Ar gas ratio γ and substrate temperature τs. Good mid-luminous optical modulation—taken to be ∼50% in ∼200-nm-thick films—was o...

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Veröffentlicht in:Solar energy materials and solar cells 2013-08, Vol.115, p.172-180
Hauptverfasser: Sorar, Idris, Pehlivan, Esat, Niklasson, Gunnar A., Granqvist, Claes G.
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Building insulation
Buildings
Buildings. Public works
Deposition
Deposition parameters
Direct current
Electrochromism
Electrolytes
Engineering Science with specialization in Solid State Physics
Exact sciences and technology
External envelopes
Optimization
Solar energy
Sputter deposition
Teknisk fysik med inriktning mot fasta tillståndets fysik
Thermal comfort
Thin films
Titanium dioxide
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Zusammenfassung:We performed a comprehensive study on the electrochromism in TiO2 thin films made by reactive DC magnetron sputtering and elucidated the roles of sputter gas pressure p, O2/Ar gas ratio γ and substrate temperature τs. Good mid-luminous optical modulation—taken to be ∼50% in ∼200-nm-thick films—was obtained under charge exchange in a Li+ electrolyte for p>15mTorr and τs
ISSN:0927-0248
1879-3398
1879-3398
DOI:10.1016/j.solmat.2013.03.035