Selective Insulation of Carbon Nanotubes

We demonstrate a method for the selective encapsulation of carbon nanotubes in thin parylene films using iron as a sacrificial lift‐off layer. The iron serves as an inhibitor of parylene deposition and prevents the parylene molecules from linking, thus facilitating selective area coating after lift‐...

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Veröffentlicht in:Physica status solidi. B, Basic research Basic research, 2017-11, Vol.254 (11), p.n/a
Hauptverfasser: Dunn, Gabriel, Shen, Konlin, Barzegar, Hamid Reza, Shi, Wu, Belling, Jason N., Nguyen, Tran N. H., Barkovich, Emil, Chism, Kyle, Maharbiz, Michel M., DeWeese, Michael R., Zettl, Alex
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Sprache:eng
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Zusammenfassung:We demonstrate a method for the selective encapsulation of carbon nanotubes in thin parylene films using iron as a sacrificial lift‐off layer. The iron serves as an inhibitor of parylene deposition and prevents the parylene molecules from linking, thus facilitating selective area coating after lift‐off. Dunn et al. demonstrate that iron can be used as a sacrificial inhibition layer for the patterning of parylene thin films. Furthermore, the authors demonstrate that this is an ideal method for selectively insulating carbon nanotube (CNT) based probes as shown in the figure.
ISSN:0370-1972
1521-3951
1521-3951
DOI:10.1002/pssb.201700202