Electrons on a straight path: A novel ionisation vacuum gauge suitable as reference standard

The consortium of the European project 16NRM05 designed a novel ionisation vacuum gauge in which the electrons take a straight path from the emitting cathode through the ionisation space into a Faraday cup. Compared to existing ionisation vacuum gauges, this has the advantage that the electron path...

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Veröffentlicht in:Vacuum 2021-07, Vol.189, p.110239, Article 110239
Hauptverfasser: Jousten, Karl, Bernien, Matthias, Boineau, Frédéric, Bundaleski, Nenad, Illgen, Claus, Jenninger, Berthold, Jönsson, Gustav, Šetina, Janez, Teodoro, Orlando M.N.D., Vičar, Martin
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Sprache:eng
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Zusammenfassung:The consortium of the European project 16NRM05 designed a novel ionisation vacuum gauge in which the electrons take a straight path from the emitting cathode through the ionisation space into a Faraday cup. Compared to existing ionisation vacuum gauges, this has the advantage that the electron path length is well defined. It is independent of the point and angle of emission and is not affected by space charge around the collector. In addition, the electrons do not hit the anode where they can be reflected, generate secondary electrons or cause desorption of neutrals or ions. This design was chosen in order to develop a more stable ionisation vacuum gauge suitable as reference standard in the range of 10−6 Pa to 10−2 Pa for calibration purposes of other vacuum gauges and quadrupole mass spectrometers. Prototype gauges were produced by two different manufacturers and showed predictable sensitivities with a very small spread (
ISSN:0042-207X
1879-2715
1879-2715
DOI:10.1016/j.vacuum.2021.110239