Photo-dissociation of hydrogen passivated dopants in gallium arsenide
A theoretical and experimental study of the photo-dissociation mechanisms of hydrogen passivated n- and p-type dopants in gallium arsenide is presented. The photo-induced dissociation of the Si Ga–H complex has been observed for relatively low photon energies (3.48 eV), whereas the photo-dissociatio...
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Veröffentlicht in: | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Beam interactions with materials and atoms, 2002, Vol.186 (1), p.234-239, Article 234 |
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Hauptverfasser: | , , , , , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | A theoretical and experimental study of the photo-dissociation mechanisms of hydrogen passivated n- and p-type dopants in gallium arsenide is presented. The photo-induced dissociation of the Si
Ga–H complex has been observed for relatively low photon energies (3.48 eV), whereas the photo-dissociation of C
As–H is not observed for photon energies up to 5.58 eV. This fundamental difference in the photo-dissociation behavior between the two dopants is explained in terms of the localized excitation energies about the Si–H and C–H bonds. |
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ISSN: | 0168-583X 1872-9584 1872-9584 0168-583X |
DOI: | 10.1016/S0168-583X(01)00949-1 |