Optical properties of SiC investigated by spectroscopic ellipsometry from 3.5 to 10 eV

In this work we present the dielectric function of hexagonal 4H- and 6H-SiC polytypes as well as the cubic 3C-SiC polytype in the energy range from 3.5 to 10 eV measured by spectroscopic ellipsometry. We operated with synchrotron radiation at the Berlin electron storage ring BESSY I. Additionally th...

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Veröffentlicht in:	Thin solid films 2000-03, Vol.364 (1-2), p.111-113
Hauptverfasser:	COBET, C, WILMERS, K, WETHKAMP, T, EDWARDS, N. V, ESSER, N, RICHTER, W
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Exact sciences and technology NATURAL SCIENCES NATURVETENSKAP Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Other nonmetallic inorganics Other nonmetals Physics Visible and ultraviolet spectra
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Zusammenfassung:	In this work we present the dielectric function of hexagonal 4H- and 6H-SiC polytypes as well as the cubic 3C-SiC polytype in the energy range from 3.5 to 10 eV measured by spectroscopic ellipsometry. We operated with synchrotron radiation at the Berlin electron storage ring BESSY I. Additionally the samples were investigated by atomic force microscopy to correct the measured dielectric function for the influence of surface roughness. The experimental results are compared to theoretical calculations.
ISSN:	0040-6090 1879-2731 1879-2731
DOI:	10.1016/s0040-6090(99)00893-7