Synthesis of carbon nitride thin films by low-energy ion beam assisted evaporation: on the mechanisms for fullerene-like microstructure formation

Synthesis of carbon nitride thin films by low-energy ion beam assisted evaporation: on the mechanisms for fullerene-like microstructure formation

Carbon nitride (CN x ) thin films were grown at different substrate temperatures by low-energy (

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Bibliographische Detailangaben
Veröffentlicht in:Thin solid films 2005-07, Vol.483 (1), p.89-94
Hauptverfasser: Gago, R., Neidhardt, J., Vinnichenko, M., Kreissig, U., Czigány, Zs, Kolitsch, A., Hultman, L., Möller, W.
Format: Artikel
Sprache:eng
Schlagworte:
Carbon nitride
Fullerene-like materials
Growth mechanisms
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NATURAL SCIENCES
NATURVETENSKAP
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Zusammenfassung:Carbon nitride (CN x ) thin films were grown at different substrate temperatures by low-energy (
ISSN:0040-6090
1879-2731
1879-2731
DOI:10.1016/j.tsf.2004.12.027