An adhesive bonding approach by hydrogen silsesquioxane for silicon carbide-based LED applications

We report an adhesive bonding approach using hydrogen silsesquioxane (HSQ) for silicon carbide (SiC) samples. A hybrid light-emitting diode (LED) was successfully fabricated through bonding a near-ultraviolet (NUV) LED grown on a commercial 4H-SiC substrate to a free-standing boron-nitrogen co-doped...

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Veröffentlicht in:Materials science in semiconductor processing 2019-03, Vol.91, p.9-12
Hauptverfasser: Lin, Li, Ou, Yiyu, Jokubavicius, Valdas, Syväjärvi, Mikael, Liang, Meng, Liu, Zhiqiang, Yi, Xiaoyan, Schuh, Philipp, Wellmann, Peter, Herstrøm, Berit, Jensen, Flemming, Ou, Haiyan
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Sprache:eng
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Zusammenfassung:We report an adhesive bonding approach using hydrogen silsesquioxane (HSQ) for silicon carbide (SiC) samples. A hybrid light-emitting diode (LED) was successfully fabricated through bonding a near-ultraviolet (NUV) LED grown on a commercial 4H-SiC substrate to a free-standing boron-nitrogen co-doped fluorescent-SiC epi-layer. The bonding quality and the electrical performance of the hybrid LED device were characterized. Neither voids nor defects were observed which indicates a good bonding quality of the proposed HSQ approach. A strong warm white emission was successfully obtained from the hybrid LED through an electric current injection of 30 mA.
ISSN:1369-8001
1873-4081
1873-4081
DOI:10.1016/j.mssp.2018.10.028