Low-energy ion irradiation during film growth: Kinetic pathways leading to enhanced adatom migration rates
Embedded-atom molecular dynamics simulations are used to investigate the effects of low-energy self-ion irradiation of Pt adatoms on Pt(111). Here, we concentrate on self-bombardment dynamics, i.e., isolating and monitoring the atomic processes, induced by normally incident Pt atoms with energies E...
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Veröffentlicht in: | Applied physics letters 2005-05, Vol.86 (21), p.211915 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Embedded-atom molecular dynamics simulations are used to investigate the effects of low-energy self-ion irradiation of Pt adatoms on Pt(111). Here, we concentrate on self-bombardment dynamics, i.e., isolating and monitoring the atomic processes, induced by normally incident Pt atoms with energies E ranging from 5 to 50 eV, that can affect intra- and interlayer mass transport.. We find that adatom scattering, surface channeling, and dimer formation occur at all energies. Atomic intermixing events involving incident and terrace atoms are observed at energies ⩾15eV, while the collateral formation of residual surface vacancies is observed only with E>40eV. The overall effect of low-energy self-ion irradiation is to enhance lateral adatom and terrace atom migration. |
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ISSN: | 0003-6951 1077-3118 1077-3118 |
DOI: | 10.1063/1.1940122 |