Ion-acoustic solitary waves in a high power pulsed magnetron sputtering discharge

We report on the creation and propagation of ion-acoustic solitary waves in a high power pulsed magnetron sputtering discharge. A dense localized plasma is created by applying high energy pulses (4-12 J) of length ~70,us, at a repetition frequency of 50 pulses per second, to a planar magnetron sputt...

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Veröffentlicht in:Journal of physics. D, Applied physics Applied physics, 2005-09, Vol.38 (18), p.3417-3421
Hauptverfasser: Gylfason, K B, Alami, J, Helmersson, U, Gudmundsson, J T
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Sprache:eng
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Zusammenfassung:We report on the creation and propagation of ion-acoustic solitary waves in a high power pulsed magnetron sputtering discharge. A dense localized plasma is created by applying high energy pulses (4-12 J) of length ~70,us, at a repetition frequency of 50 pulses per second, to a planar magnetron sputtering source. The temporal behaviour of the electron density, measured by a Langmuir probe, shows solitary waves travelling away from the magnetron target. The velocity of the waves depends on the gas pressure but is roughly independent of the pulse energy.
ISSN:0022-3727
1361-6463
1361-6463
DOI:10.1088/0022-3727/38/18/015