Ion-acoustic solitary waves in a high power pulsed magnetron sputtering discharge
We report on the creation and propagation of ion-acoustic solitary waves in a high power pulsed magnetron sputtering discharge. A dense localized plasma is created by applying high energy pulses (4-12 J) of length ~70,us, at a repetition frequency of 50 pulses per second, to a planar magnetron sputt...
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Veröffentlicht in: | Journal of physics. D, Applied physics Applied physics, 2005-09, Vol.38 (18), p.3417-3421 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | We report on the creation and propagation of ion-acoustic solitary waves in a high power pulsed magnetron sputtering discharge. A dense localized plasma is created by applying high energy pulses (4-12 J) of length ~70,us, at a repetition frequency of 50 pulses per second, to a planar magnetron sputtering source. The temporal behaviour of the electron density, measured by a Langmuir probe, shows solitary waves travelling away from the magnetron target. The velocity of the waves depends on the gas pressure but is roughly independent of the pulse energy. |
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ISSN: | 0022-3727 1361-6463 1361-6463 |
DOI: | 10.1088/0022-3727/38/18/015 |