Characterization of Crystalline TiC Films Grown by Pulsed Nd:YAG Laser Deposition

Titanium carbide (TiC) thin films have been grown on Si (100) substrates using a pulsed neodymium: yttrium-aluminum-garnet (Nd:YAG) laser deposition method. X-ray diffraction (XRD) pattern of the TiC film shows that substrate temperature is one of the most important parameters in the fabrication of crystalline TiC film. Crystalline TiC films can be prepared at substrate temperatures above 500°C. Field emission scanning electron microscope (FE-SEM) indicates that the surface of the film is very smooth and pinhole-free.