Crack-Defined Electronic Nanogaps
Achieving near‐atomic‐scale electronic nanogaps in a reliable and scalable manner will facilitate fundamental advances in molecular detection, plasmonics, and nanoelectronics. Here, a method is shown for realizing crack‐defined nanogaps separating TiN electrodes, allowing parallel and scalable fabri...
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Veröffentlicht in: | Advanced materials (Weinheim) 2016-03, Vol.28 (11), p.2178-2182 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | Achieving near‐atomic‐scale electronic nanogaps in a reliable and scalable manner will facilitate fundamental advances in molecular detection, plasmonics, and nanoelectronics. Here, a method is shown for realizing crack‐defined nanogaps separating TiN electrodes, allowing parallel and scalable fabrication of arrays of sub‐10 nm electronic nanogaps featuring individually defined gap widths. |
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ISSN: | 0935-9648 1521-4095 1521-4095 |
DOI: | 10.1002/adma.201504569 |