Low-Pressure Inductively Coupled CF3Br Plasma Studied by the Langmuir Probe and Optical Emission Spectroscopy Techniques

Low-pressure inductively coupled plasma of gaseous CF 3 Br has been studied by Langmuir probe and optical emission spectroscopy (actinometry) techniques. The electron temperature, electron and positive ion concentrations, and concentrations of fluorine- and bromine-containing radicals are determined...

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Veröffentlicht in:	Technical physics letters 2021, Vol.47 (1), p.99-102
Hauptverfasser:	Kuzmenko, V. O., Miakonkikh, A. V.
Format:	Artikel
Sprache:	eng
Schlagworte:	Actinometry Bromine Classical and Continuum Physics Electron energy Emission analysis Emission spectroscopy Fluorine Inductively coupled plasma Low pressure Magnetism Optical emission spectroscopy Physical Sciences Physics Physics and Astronomy Physics, Applied Positive ions Science & Technology Spectrum analysis
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Beschreibung
Zusammenfassung:	Low-pressure inductively coupled plasma of gaseous CF 3 Br has been studied by Langmuir probe and optical emission spectroscopy (actinometry) techniques. The electron temperature, electron and positive ion concentrations, and concentrations of fluorine- and bromine-containing radicals are determined. An explanation of the previously reported significant degradation of ultralow- k dielectrics during etching in this plasma is proposed.
ISSN:	1063-7850 1090-6533
DOI:	10.1134/S1063785021010247