Substructure and orientation of Pd-Cu solid solution thin films

The phase and elemental composition, substructure, orientation, and relief of Pd-Cu thin films produced by magnetron sputtering have been investigated using the techniques of TEM, HEED, and AFM. Three-orientation epitaxial β-phase structures (CsCl-type lattice) have been obtained by plasma-ion sputtering a Pd-Cu target on (001) fluorphlogopite (F) cleavages in the substrate temperature range of 550–800 K. The β-phase crystallites in the two-phase epitaxial solid solution films were oriented, with respect to the α-phase, according to Nishiyama—Wassermann and Kurdyumov—Sachs relations. Single-crystal films of α-and β-phase solid solutions have been grown on fluorphlogopite. The effect of the second component appeared as the formation of (001)[110] β CuAu ∥ (001)[100] F -type orientations.