Polycrystalline VO2 thin films via femtosecond laser processing of amorphous VOx

Femtosecond laser processing of pulsed laser-deposited amorphous vanadium oxide thin films was investigated. Polycrystalline VO 2 thin films were achieved by femtosecond laser processing in air at room temperature. The electrical transport properties, crystal structure, surface morphology, and optical properties were characterized. The laser-processed films exhibited a metal–insulator phase transition characteristic of VO 2 , thus presenting a pathway for the growth of crystalline vanadium dioxide films on low-temperature substrates.