Dynamic Analysis on Particle Concentration Induced by Opening the Door of a Front Opening Unified Pod (FOUP) that Loaded with 25 Pieces of 300 mm Wafer Manufacturing Processes

This study investigates experimentally and numerically the influences of FOUP door opening speed (V door ) and the pressure difference (dP) on the dynamic distributions of the averaged non-dimensional particle concentration in the FOUP (C ave ), which is defined as averaged particle concentration in the FOUP (c ave ) divided by the particle concentration in the clean room (c CR ). Here dP is the difference between the mini-environment pressure and the clean-room pressure. Results show that when V door lies between 0.05 m/s~0.15 m/s and dP within 0.3 Pa-12.7 Pa, C ave proportional to 1/2ρV door 2 and inversely proportional to dP. This can be expressed by a stepwise multiple regression equation: C ave = 4.56 × 10 −1 (1/2ρV door 2 ) – 4.6 × 10 −4 dP + 4.96 × 10 −3 .