An ion source using laser ablation

This article describes the measurement of the fractional ionization in an ablated plume produced by excimer laser, and the application of the plume as an ion source. Laser ablation of iron, aluminum, and tantalum with a KrF excimer laser was performed in a vacuum chamber. The ablated plume was caugh...

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Veröffentlicht in:	Journal of laser applications 2000-08, Vol.12 (4), p.171-174
Hauptverfasser:	Ooie, Toshihiko, Yano, Tetsuo, Yoneda, Masafumi, Katsumura, Munehide
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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