An ion source using laser ablation

This article describes the measurement of the fractional ionization in an ablated plume produced by excimer laser, and the application of the plume as an ion source. Laser ablation of iron, aluminum, and tantalum with a KrF excimer laser was performed in a vacuum chamber. The ablated plume was caught by a cup type electrode used to measure the amount of charged particles as current wave forms. Applying electrostatic potential larger than 40 V, the current wave forms were separated into electropositive and electronegative peaks. Each peak indicates ions and electrons, respectively. The amount of ions, 6×10 13 ions/pulse, was estimated by integrating the electropositive peak. The ionization degree of 1.7% was also estimated by a series of analyses. For an aluminum target, the ion current reached 2 A at the peak and 1 mA on average at 60 kJ/m2, 500 mJ, and 50 Hz.