Crystallization of submicron amorphous hydrogenated silicon films with different hydrogen concentration by nanosecond ruby laser irradiation

Crystallization of submicron amorphous hydrogenated silicon films with different hydrogen concentration by nanosecond ruby laser irradiation

Pulse laser annealing remains an actual problem aimed to crystallization of amorphous films on nonrefractive substrates. But, the most previous works studied laser crystallization of relatively thin (

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Veröffentlicht in:Journal of laser applications 2019-02, Vol.31 (1)
Hauptverfasser: Krivyakin, G. K., Kamaev, G. N., Ivlev, G. D., Prakopyeu, S. L., Volodin, V. A.
Format: Artikel
Sprache:eng
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Zusammenfassung:Pulse laser annealing remains an actual problem aimed to crystallization of amorphous films on nonrefractive substrates. But, the most previous works studied laser crystallization of relatively thin (
ISSN:1042-346X
1938-1387
DOI:10.2351/1.5030791