A double mirror W/C multilayer monochromator for radiation biology applications

A double-mirror multilayer monochromator was developed for the purpose of irradiating live cell cultures at the Synchrotron Radiation Center, University of Wisconsin–Madison. The monochromator is designed for the soft x-ray region with photon energies between 270 and 2400 eV. Multilayer mirrors with...

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Veröffentlicht in:Medical physics (Lancaster) 1998-05, Vol.25 (5), p.773-779
Hauptverfasser: MacKay, J. F., Pearson, D. W., Nelms, B. E., DeLuca, P. M., Gould, M. N., Lagally, M. G.
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Sprache:eng
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Zusammenfassung:A double-mirror multilayer monochromator was developed for the purpose of irradiating live cell cultures at the Synchrotron Radiation Center, University of Wisconsin–Madison. The monochromator is designed for the soft x-ray region with photon energies between 270 and 2400 eV. Multilayer mirrors with 55 bilayers of W/C and a bilayer spacing of d=3.0 nm are sputter deposited on Si substrates. By proper masking of the sputtering sources, variation in the bilayer spacing over the area of the mirror is minimized. The uniformity of the bilayer spacing was measured to be Δd/d
ISSN:0094-2405
2473-4209
DOI:10.1118/1.598259