Comment on “Restoration of the original depth distribution from the SIMS profile using the depth resolution function in framework of RMR model” [J. Vac. Sci. Technol. B 41, 024003 (2023)]
This comment is a summary of scientifically evident shortcomings of the so-called recoil-mixing-roughness (RMR)-model proposed in several publications by Kudriavtsev et al. in order to describe the formation of sputter depth profiles of concentration.
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| Veröffentlicht in: | Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2023-09, Vol.41 (5) |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | This comment is a summary of scientifically evident shortcomings of the so-called recoil-mixing-roughness (RMR)-model proposed in several publications by Kudriavtsev et al. in order to describe the formation of sputter depth profiles of concentration. |
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| ISSN: | 2166-2746 2166-2754 |
| DOI: | 10.1116/6.0002779 |