Atmospheric spatial atomic layer deposition of ZnOS buffer layers for flexible Cu(In,Ga)Se2 solar cells

Zinc oxysulfide (ZnOS) is synthesized at atmospheric pressure in a laboratory-scale spatial atomic layer deposition setup by sequentially exposing the substrate to diethyl zinc and an H2O/H2S mixture, separated by a nitrogen gas curtain. The co-injection of H2O and H2S vapors in the same deposition...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2018-09, Vol.36 (5)
Hauptverfasser:	Illiberi, Andrea, Frijters, Corne, Ruth, Marta, Bremaud, David, Poodt, Paul, Roozeboom, Fred, Bolt, Pieter Jan
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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