Physical vapor deposition of Ag nanoparticles through shadowing and re-emission effects

The morphology evolution of Ag nanoparticles (NPs) deposited by glancing angle deposition (GLAD) in a wide range of nominal deposition thickness d at room temperature has been investigated systematically. Nonspherical Ag NPs are formed with d  500 nm. Based on three-dimensional Monte Carlo simulatio...

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Veröffentlicht in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2018-09, Vol.36 (5)
Hauptverfasser:	Han, Caiqin, Ye, Dexian, Zhao, Yiping, Fu, Junxue
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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