Physical vapor deposition of Ag nanoparticles through shadowing and re-emission effects

Physical vapor deposition of Ag nanoparticles through shadowing and re-emission effects

The morphology evolution of Ag nanoparticles (NPs) deposited by glancing angle deposition (GLAD) in a wide range of nominal deposition thickness d at room temperature has been investigated systematically. Nonspherical Ag NPs are formed with d  500 nm. Based on three-dimensional Monte Carlo simulatio...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2018-09, Vol.36 (5)
Hauptverfasser: Han, Caiqin, Ye, Dexian, Zhao, Yiping, Fu, Junxue
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The morphology evolution of Ag nanoparticles (NPs) deposited by glancing angle deposition (GLAD) in a wide range of nominal deposition thickness d at room temperature has been investigated systematically. Nonspherical Ag NPs are formed with d  500 nm. Based on three-dimensional Monte Carlo simulations, such a morphological change can be attributed to the high mobility and re-emission of Ag atoms as well as the shadowing effect during the GLAD growth.
ISSN:2166-2746
2166-2754
DOI:10.1116/1.5026581