Improved inflection point method of emissive probe for accurate measurement of plasma potential

The potential of the inflection point of emissive probe characteristics ( V i p ) in the limit of zero emission is considered to be an accurate indication of the plasma potential. Previous method for this limit is linearly extrapolating the change of V i p with respect to the electron emission curre...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2016-11, Vol.34 (6)
Hauptverfasser:	Li, Jian-quan, Xu, Jun, Bai, Yu-jing, Lu, Wen-qi, Wang, You-nian
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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