Improved inflection point method of emissive probe for accurate measurement of plasma potential
The potential of the inflection point of emissive probe characteristics ( V i p ) in the limit of zero emission is considered to be an accurate indication of the plasma potential. Previous method for this limit is linearly extrapolating the change of V i p with respect to the electron emission curre...
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| Veröffentlicht in: | Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2016-11, Vol.34 (6) |
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| container_title | Journal of vacuum science & technology. A, Vacuum, surfaces, and films |
| container_volume | 34 |
| creator | Li, Jian-quan Xu, Jun Bai, Yu-jing Lu, Wen-qi Wang, You-nian |
| description | The potential of the inflection point of emissive probe characteristics (
V
i
p
) in the limit of zero emission is considered to be an accurate indication of the plasma potential. Previous method for this limit is linearly extrapolating the change of
V
i
p
with respect to the electron emission current
I
e
m
i
s
to the limit
I
e
m
i
s
≈
0
, which may result in inaccurate results since evidences showed that
V
i
p
does not change well linearly with
I
e
m
i
s
. The authors found in this study that, instead of
I
e
m
i
s
,
V
i
p
changes linearly with the probe heating current (
I
h
t
) which is a function of the probe temperature (
T
p
), and the phenomenon is reasonably interpreted by the space charge voltage increasing linearly with
T
p
. An improved inflection point method of emissive probe, which utilizes linear extrapolating the
V
i
p
−
I
h
t
relation to the heating current for initial emission, is proposed for accurate measurement of plasma potential. |
| doi_str_mv | 10.1116/1.4964834 |
| format | Article |
| fullrecord | <record><control><sourceid>scitation_cross</sourceid><recordid>TN_cdi_scitation_primary_10_1116_1_4964834</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>scitation_primary_10_1116_1_4964834</sourcerecordid><originalsourceid>FETCH-LOGICAL-c299t-d2cf7eb78bd871e3920b8ed38999d0a3884b1e96caf18fa500b7475d8a20d5cf3</originalsourceid><addsrcrecordid>eNqd0E1LAzEQBuAgCtbqwX-Qq8LWSfYrOUrxo1DwoueQTSYY2W2WJC34702x4N3TwPDMC_MScstgxRjrHtiqkV0j6uaMLFjLoRJtK8_JAvq6qTgDdkmuUvoCAM6hWxC1meYYDmip37kRTfZhR-fgd5lOmD-DpcFRnHxK_oC00AGpC5FqY_ZRZyxKp33ECctFofOo06RLQi4Lr8drcuH0mPDmNJfk4_npff1abd9eNuvHbWW4lLmy3Lgeh14MVvQMa8lhEGhrIaW0oGshmoGh7Ix2TDjdAgx907dWaA62Na5ekrvfXBNDShGdmqOfdPxWDNSxGcXUqZli739tMj7r48f_w4cQ_6Carat_ABr7dCI</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Improved inflection point method of emissive probe for accurate measurement of plasma potential</title><source>AIP Journals Complete</source><source>Alma/SFX Local Collection</source><creator>Li, Jian-quan ; Xu, Jun ; Bai, Yu-jing ; Lu, Wen-qi ; Wang, You-nian</creator><creatorcontrib>Li, Jian-quan ; Xu, Jun ; Bai, Yu-jing ; Lu, Wen-qi ; Wang, You-nian</creatorcontrib><description>The potential of the inflection point of emissive probe characteristics (
V
i
p
) in the limit of zero emission is considered to be an accurate indication of the plasma potential. Previous method for this limit is linearly extrapolating the change of
V
i
p
with respect to the electron emission current
I
e
m
i
s
to the limit
I
e
m
i
s
≈
0
, which may result in inaccurate results since evidences showed that
V
i
p
does not change well linearly with
I
e
m
i
s
. The authors found in this study that, instead of
I
e
m
i
s
,
V
i
p
changes linearly with the probe heating current (
I
h
t
) which is a function of the probe temperature (
T
p
), and the phenomenon is reasonably interpreted by the space charge voltage increasing linearly with
T
p
. An improved inflection point method of emissive probe, which utilizes linear extrapolating the
V
i
p
−
I
h
t
relation to the heating current for initial emission, is proposed for accurate measurement of plasma potential.</description><identifier>ISSN: 0734-2101</identifier><identifier>EISSN: 1520-8559</identifier><identifier>DOI: 10.1116/1.4964834</identifier><identifier>CODEN: JVTAD6</identifier><language>eng</language><ispartof>Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2016-11, Vol.34 (6)</ispartof><rights>American Vacuum Society</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c299t-d2cf7eb78bd871e3920b8ed38999d0a3884b1e96caf18fa500b7475d8a20d5cf3</citedby><cites>FETCH-LOGICAL-c299t-d2cf7eb78bd871e3920b8ed38999d0a3884b1e96caf18fa500b7475d8a20d5cf3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,794,4509,27922,27923</link.rule.ids></links><search><creatorcontrib>Li, Jian-quan</creatorcontrib><creatorcontrib>Xu, Jun</creatorcontrib><creatorcontrib>Bai, Yu-jing</creatorcontrib><creatorcontrib>Lu, Wen-qi</creatorcontrib><creatorcontrib>Wang, You-nian</creatorcontrib><title>Improved inflection point method of emissive probe for accurate measurement of plasma potential</title><title>Journal of vacuum science & technology. A, Vacuum, surfaces, and films</title><description>The potential of the inflection point of emissive probe characteristics (
V
i
p
) in the limit of zero emission is considered to be an accurate indication of the plasma potential. Previous method for this limit is linearly extrapolating the change of
V
i
p
with respect to the electron emission current
I
e
m
i
s
to the limit
I
e
m
i
s
≈
0
, which may result in inaccurate results since evidences showed that
V
i
p
does not change well linearly with
I
e
m
i
s
. The authors found in this study that, instead of
I
e
m
i
s
,
V
i
p
changes linearly with the probe heating current (
I
h
t
) which is a function of the probe temperature (
T
p
), and the phenomenon is reasonably interpreted by the space charge voltage increasing linearly with
T
p
. An improved inflection point method of emissive probe, which utilizes linear extrapolating the
V
i
p
−
I
h
t
relation to the heating current for initial emission, is proposed for accurate measurement of plasma potential.</description><issn>0734-2101</issn><issn>1520-8559</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2016</creationdate><recordtype>article</recordtype><recordid>eNqd0E1LAzEQBuAgCtbqwX-Qq8LWSfYrOUrxo1DwoueQTSYY2W2WJC34702x4N3TwPDMC_MScstgxRjrHtiqkV0j6uaMLFjLoRJtK8_JAvq6qTgDdkmuUvoCAM6hWxC1meYYDmip37kRTfZhR-fgd5lOmD-DpcFRnHxK_oC00AGpC5FqY_ZRZyxKp33ECctFofOo06RLQi4Lr8drcuH0mPDmNJfk4_npff1abd9eNuvHbWW4lLmy3Lgeh14MVvQMa8lhEGhrIaW0oGshmoGh7Ix2TDjdAgx907dWaA62Na5ekrvfXBNDShGdmqOfdPxWDNSxGcXUqZli739tMj7r48f_w4cQ_6Carat_ABr7dCI</recordid><startdate>201611</startdate><enddate>201611</enddate><creator>Li, Jian-quan</creator><creator>Xu, Jun</creator><creator>Bai, Yu-jing</creator><creator>Lu, Wen-qi</creator><creator>Wang, You-nian</creator><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>201611</creationdate><title>Improved inflection point method of emissive probe for accurate measurement of plasma potential</title><author>Li, Jian-quan ; Xu, Jun ; Bai, Yu-jing ; Lu, Wen-qi ; Wang, You-nian</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c299t-d2cf7eb78bd871e3920b8ed38999d0a3884b1e96caf18fa500b7475d8a20d5cf3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2016</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Li, Jian-quan</creatorcontrib><creatorcontrib>Xu, Jun</creatorcontrib><creatorcontrib>Bai, Yu-jing</creatorcontrib><creatorcontrib>Lu, Wen-qi</creatorcontrib><creatorcontrib>Wang, You-nian</creatorcontrib><collection>CrossRef</collection><jtitle>Journal of vacuum science & technology. A, Vacuum, surfaces, and films</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Li, Jian-quan</au><au>Xu, Jun</au><au>Bai, Yu-jing</au><au>Lu, Wen-qi</au><au>Wang, You-nian</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Improved inflection point method of emissive probe for accurate measurement of plasma potential</atitle><jtitle>Journal of vacuum science & technology. A, Vacuum, surfaces, and films</jtitle><date>2016-11</date><risdate>2016</risdate><volume>34</volume><issue>6</issue><issn>0734-2101</issn><eissn>1520-8559</eissn><coden>JVTAD6</coden><abstract>The potential of the inflection point of emissive probe characteristics (
V
i
p
) in the limit of zero emission is considered to be an accurate indication of the plasma potential. Previous method for this limit is linearly extrapolating the change of
V
i
p
with respect to the electron emission current
I
e
m
i
s
to the limit
I
e
m
i
s
≈
0
, which may result in inaccurate results since evidences showed that
V
i
p
does not change well linearly with
I
e
m
i
s
. The authors found in this study that, instead of
I
e
m
i
s
,
V
i
p
changes linearly with the probe heating current (
I
h
t
) which is a function of the probe temperature (
T
p
), and the phenomenon is reasonably interpreted by the space charge voltage increasing linearly with
T
p
. An improved inflection point method of emissive probe, which utilizes linear extrapolating the
V
i
p
−
I
h
t
relation to the heating current for initial emission, is proposed for accurate measurement of plasma potential.</abstract><doi>10.1116/1.4964834</doi><tpages>4</tpages></addata></record> |
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| identifier | ISSN: 0734-2101 |
| ispartof | Journal of vacuum science & technology. A, Vacuum, surfaces, and films, 2016-11, Vol.34 (6) |
| issn | 0734-2101 1520-8559 |
| language | eng |
| recordid | cdi_scitation_primary_10_1116_1_4964834 |
| source | AIP Journals Complete; Alma/SFX Local Collection |
| title | Improved inflection point method of emissive probe for accurate measurement of plasma potential |
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