Temperature dependent Cs retention, distribution, and ion yield changes during Cs+ bombardment SIMS

Temperature dependent Cs retention, distribution, and ion yield changes during Cs+ bombardment SIMS

Combining Cs+ bombardment with positive secondary molecular ion detection (MCs+) can extend the analysis capability of secondary ion mass spectrometry (SIMS) from the dilute limit (

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Veröffentlicht in:Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2016-05, Vol.34 (3)
Hauptverfasser: Giordani, Andrew, Lee, Hang Dong, Xu, Can, Gustafsson, Torgny, Hunter, Jerry L.
Format: Artikel
Sprache:eng
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Zusammenfassung:Combining Cs+ bombardment with positive secondary molecular ion detection (MCs+) can extend the analysis capability of secondary ion mass spectrometry (SIMS) from the dilute limit (
ISSN:2166-2746
2166-2754
DOI:10.1116/1.4943159