Effects of growth temperature on the incorporation of nitrogen in GaNAs layers
Ternary III-N-V semiconductor alloys are interesting and complex materials. GaNAs is one such material that has been studied extensively; however, the accurate determination of the N content within this material in which the growth conditions significantly increases the amount of interstitial N has...
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Veröffentlicht in: | Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2016-03, Vol.34 (2) |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Ternary III-N-V semiconductor alloys are interesting and complex materials. GaNAs is one such material that has been studied extensively; however, the accurate determination of the N content within this material in which the growth conditions significantly increases the amount of interstitial N has not yet been reported. To address this problem, GaNAs layers (100 nm) were prepared using molecular beam epitaxy at temperatures between 400 and 600 °C with a high nominal N concentration (3%). The N content was determined using high resolution x-ray diffraction (HRXRD), secondary ion mass spectrometry (SIMS), and low-temperature photoluminescence (PL). The N concentration determined using these techniques was compared. Additionally, the relationship between the growth temperature and N concentration is discussed. The incorporation of N into interstitial sites resulted in significant variations in the N content as estimated by SIMS, HRXRD, and PL. |
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ISSN: | 2166-2746 2166-2754 |
DOI: | 10.1116/1.4942900 |