Possible mechanisms in atomic force microscope-induced nano-oxidation lithography in epitaxial La0.67Ba0.33MnO3-δ thin films

Atomic force microscope (AFM) induced nanolithography has been successfully utilized on perovskite manganite thin films by several groups to create nanoscale patterns for various fundamental mesoscopic-scale transport studies. However, the chemical and physical processes involved have not been under...

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Veröffentlicht in:	Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2016-03, Vol.34 (2)
Hauptverfasser:	Yong, Grace J., Vanderlinde, William E., Tanyi, Ekembu Kevin, Schaefer, David M., Stumpf, Christopher, Kolagani, Rajeswari M.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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