Possible mechanisms in atomic force microscope-induced nano-oxidation lithography in epitaxial La0.67Ba0.33MnO3-δ thin films
Atomic force microscope (AFM) induced nanolithography has been successfully utilized on perovskite manganite thin films by several groups to create nanoscale patterns for various fundamental mesoscopic-scale transport studies. However, the chemical and physical processes involved have not been under...
Gespeichert in:
Veröffentlicht in: | Journal of vacuum science and technology. B, Nanotechnology & microelectronics Nanotechnology & microelectronics, 2016-03, Vol.34 (2) |
---|---|
Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | Atomic force microscope (AFM) induced nanolithography has been successfully utilized on perovskite manganite thin films by several groups to create nanoscale patterns for various fundamental mesoscopic-scale transport studies. However, the chemical and physical processes involved have not been understood. This work presents possible microscopic mechanisms for AFM induced nanolithography in La2/3Ba1/3MnO3-δ films induced by an AFM tip, which is negatively biased with respect to the sample in a humid environment. A self-consistent conceptual framework, which accounts for the previously reported observations of changes in the nanomodified regions such as volume increases, selective acid etching, as well as changes in the chemical composition detected by energy dispersive spectroscopy, is reported. Microscopic mechanisms delineated in this work are based on the following: existence of known compounds composed of the available elements (La, Ba, Mn,O, and H) resulting in equal or higher formal oxidation states, postulated electrochemical half reactions resulting in these compounds, reference density and solubility data for these compounds, incorporation of environmental H2O and CO2 by the postulated product solids, electromigration, and electrochemical migration. |
---|---|
ISSN: | 2166-2746 2166-2754 |
DOI: | 10.1116/1.4941243 |